Microscanner enable fast motion of a micrometer focus inside glass

High speed Microscanner with integrated x-y-table, fast focusing and microscope behind the blue sliding door
High speed Microscanner with integrated x-y-table, fast focusing and digital microscope

We make two kind of Microscanners available for laser micro production technologies demanding strong focusing (e.g. ablation, glass welding, crack free internal marking, 2 photon polymerization, waveguide writing and SLE of course):

The flexible Microscanner for prototyping and small series of complex 3D structures can be matched with ultrafast lasers with average power of 1-20 W and repetition rate of 100 kHz – 2 MHz. E.g. laser radiation with the wavelength of 1 µm is focused by an optic with focal length of 10 mm to a focal radius of 1 µm and is scanned through the glass with a velocity >0.2 m/s on a curve with a radius of 500 µm. Using variable optics with focal length of 2 mm - 20 mm precision, focal radius and scanning velocity are adapted to the structuring task.  

The high speed Microscanner is designed to produce special structures with large throughput and is designed to exploit the potential of high power ultrafast lasers with an average power of 50-150 W and repetition rate of several MHz. Using a focusing optics with 10 mm focal length laser radiation with 1 µm wavelength is focused to a beam radius of about 1 µm and is scanned with 10 m/s on a curve with a radius of 500 µm. Using a focusing optics with focal length of 160 mm the values would equate to a velocity of 160 m/s and linearly larger focal radius and radius of curvature of the scanning track.

The Microscanners are operated with our CAM-NC-software, which is suitable to control different kind of scanner systems, translation stages and ultrafast lasers from various vendors. With the flexible Microscanner you may print your 3D-CAD data directly in the material using our CAD-CAM software.

We integrate the Microscanners with software, machine vision, various kinds of lasers and translation stages in a casing or we can integrate them in your allready existing handling system.